Nitrogen Trifluoride

Nitrogen trifluoride is a colorless, non-flammable, and toxic gas with a moldy smell. It is commonly used as an etchant and chamber-cleaning agent in the semiconductor industry. NF3 is an effective agent for removing silicon and other silicon compounds from semiconductor surfaces, including solar cells, LCD displays, and other electronic components. The gas breaks down to form fluorine radicals, which are highly reactive and can effectively remove silicon compounds and other metals.

In addition to its use in the semiconductor industry, nitrogen trifluoride is also used in other industrial applications, such as in the production of plasma displays, and optical fibers, and in the manufacture of some flat panel displays. It is also used in the production of certain chemicals and pharmaceuticals, as well as in the treatment of wastewater.

The use of nitrogen trifluoride as a cleaning agent has gained popularity due to its low global warming potential (GWP) compared to other cleaning agents such as sulfur hexafluoride (SF6) and perfluorocarbons (PFCs). Nitrogen trifluoride has a relatively short atmospheric lifetime, which means that it breaks down quickly in the atmosphere and does not contribute significantly to global warming. As a result, it is considered a more environmentally friendly alternative for cleaning and etching processes in the semiconductor industry.

Ace Gases offers nitrogen trifluoride in cylinders of various sizes and purities for industrial use.


Semiconductor manufacturing

NF3 is commonly used to remove silicon and other silicon compounds during the production of semiconductors, including solar cells and LCD displays. It is used as an etchant in the plasma etching process and as a cleaning agent for PECVD chambers.

Electronics manufacturing

NF3 is also used in the production of other electronic components, such as microchips and flat panel displays.

Aerospace and aviation

NF3 is used as a rocket propellant due to its ability to release large amounts of energy when burned. It is also used in the production of spacecraft components and as a cleaning agent for rocket engines.

Medical industry

NF3 is used in the sterilization of medical equipment due to its ability to destroy bacteria and other pathogens.


Nitrogen Trifluoride NF3