Trichlorosilane (TCS) is a colorless, volatile liquid compound with the chemical formula HSiCl₃. It is a highly reactive and corrosive substance commonly used in the semiconductor industry for the production of silicon-based materials.
Trichlorosilane is a key precursor in the manufacturing of high-purity silicon and is used in processes such as chemical vapor deposition (CVD) to deposit thin layers of silicon on substrates, creating semiconductor devices like integrated circuits and solar cells. Additionally, TCS serves as a key raw material in the manufacturing of polysilicon, a pure form of silicon used in electronic components. In the field of solar photovoltaic (PV) cells, TCS is employed to deposit silicon layers that convert sunlight into electrical energy. Furthermore, TCS is utilized in the production of specialty chemicals, including silane gases, silicone polymers, and silane coupling agents, which find various applications in the semiconductor and electronics sectors.
Trichlorosilane requires careful handling and storage due to its corrosive and reactive nature. Ace Gases supplies various grades and packaging options by adhering to strict safety protocols and measures to ensure the safe use and transport of trichlorosilane in the industry.
Application
Silicon Deposition
TCS is used as a feedstock for the chemical vapor deposition (CVD) process to create thin layers of silicon on semiconductor substrates, forming the foundation for integrated circuits and other electronic devices.
Polysilicon Production
Trichlorosilane is a key raw material in the production of polysilicon, a highly pure form of silicon. Polysilicon is used to create conductive and semiconductive layers in various electronic components.
Solar Photovoltaic (PV) Cells
TCS is used in the manufacturing of solar PV cells, where it serves as a precursor for depositing silicon layers that capture and convert sunlight into electrical energy.
Specialty Chemicals
Trichlorosilane is also utilized in the production of various specialty chemicals used in the semiconductor and electronics industries, such as silane gases, silicone polymers, and silane coupling agents.
